Wireless Inertial Sensors Made on Flexible Substrates and Based on Thermal Convection and Near-Field-Communication Principles Article Swipe
Jium-Ming Lin
,
Cheng-Hung Lin
·
YOU?
·
· 2016
· Open Access
·
· DOI: https://doi.org/10.18494/sam.2016.1313
YOU?
·
· 2016
· Open Access
·
· DOI: https://doi.org/10.18494/sam.2016.1313
In this study, several kinds of wireless inertial sensors, such as accelerometers, angular accelerometers and inclinometers based on the thermal convection principle, were integrated with near-field-communication (NFC) antennas and made on a flexible substrate so that the devices can become wireless sensors.The reason to apply a flexible substrate instead of the traditional silicon was to reduce the power leaked through the flexible substrate, because the thermal conductivity of silicon is 0.06-0.0017W/(cm•K), which is 25 times larger than that of the flexible substrate, 1.48 W/(cm•K).Another key goal was to fabricate the nonfloating-type devices without making a cavity on the substrate, so that the new devices would be easier to fabricate and more reliable than the previous floating-type; in which the components of heaters and thermal sensors lay over the cavity on the silicon substrate.Also inert Xe gas was used to fill the chamber instead of the previously used CO 2 or air, so that the oxidization problem of the thermal sensors caused by the heater can be eliminated.On the other hand, one can fabricate the components of heaters and thermal sensors on the flexible substrate directly or stack them on a layer of aluminum nitride and then use some packages with hemispherical or hemicylindrical chambers instead of rectangular ones.The sensitivities were analyzed and compared with those of the previous sensors to prove the feasibility of these novel ideas.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.18494/sam.2016.1313
- https://sensors.myu-group.co.jp/sm_pdf/SM1215.pdf
- OA Status
- gold
- Cited By
- 1
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4242283053
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4242283053Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.18494/sam.2016.1313Digital Object Identifier
- Title
-
Wireless Inertial Sensors Made on Flexible Substrates and Based on Thermal Convection and Near-Field-Communication PrinciplesWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2016Year of publication
- Publication date
-
2016-01-01Full publication date if available
- Authors
-
Jium-Ming Lin, Cheng-Hung LinList of authors in order
- Landing page
-
https://doi.org/10.18494/sam.2016.1313Publisher landing page
- PDF URL
-
https://sensors.myu-group.co.jp/sm_pdf/SM1215.pdfDirect link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
goldOpen access status per OpenAlex
- OA URL
-
https://sensors.myu-group.co.jp/sm_pdf/SM1215.pdfDirect OA link when available
- Concepts
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Wireless, Inertial frame of reference, Thermal, Convection, Field (mathematics), Near field communication, Computer science, Electrical engineering, Engineering, Physics, Telecommunications, Mechanics, Meteorology, Classical mechanics, Mathematics, Pure mathematics, Ultra high frequencyTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
1Total citation count in OpenAlex
- Citations by year (recent)
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2018: 1Per-year citation counts (last 5 years)
- Related works (count)
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10Other works algorithmically related by OpenAlex
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| abstract_inverted_index.packages | 198 |
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| cited_by_percentile_year.min | 90 |
| corresponding_author_ids | https://openalex.org/A5111416819 |
| countries_distinct_count | 1 |
| institutions_distinct_count | 2 |
| corresponding_institution_ids | https://openalex.org/I59460038 |
| sustainable_development_goals[0].id | https://metadata.un.org/sdg/7 |
| sustainable_development_goals[0].score | 0.4699999988079071 |
| sustainable_development_goals[0].display_name | Affordable and clean energy |
| citation_normalized_percentile.value | 0.64267282 |
| citation_normalized_percentile.is_in_top_1_percent | False |
| citation_normalized_percentile.is_in_top_10_percent | False |