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DIFFUSION PROCESSES IN METAL LAYERS OF Mo/Si MULTILAYER X-RAY MIRRORS DURING DEPOSITION Open

Y. P. Pershyn, V.S. Chumak, A. Yu. Devizenko, E. N. Zubarev, V.A. Sevryukova , et al. · 2024

Small-angle reflectometry, X-ray diffractometry and X-ray tensometry (=0.154 nm) were used to study the structure of Mo layers in Mo/Si multilayer X-ray mirrors produced by magnetron sputtering as a function of the Ar pressure in the rang…

<i>X-Ray Calc 3</i>: improved software for simulation and inverse problem solving for X-ray reflectivity Open

Oleksiy V. Penkov, Mingfeng Li, Said Mikki, A. Yu. Devizenko, Ihor Kopylets · 2024

Computer science Physics Mathematics

This work introduces X-Ray Calc ( XRC ), an open-source software package designed to simulate X-ray reflectivity (XRR) and address the inverse problem of reconstructing film structures on the basis of measured XRR curves. XRC features a us…

Reflective x-ray masks for x-ray lithography Open

V.S. Chumak, Sergey Peredkov, A. Yu. Devizenko, I. А. Kopylets, Y. P. Pershyn · 2024

Materials science Physics

Application of x-ray multilayers as reflective x-ray masks for x-ray lithography is proposed. The mask is a specially prepared multilayer mirror capable to selectively reflect x-rays. The use of grazing geometry allows a pattern design on …

EFFECT OF ARGON WORKING GAS PRESSURE ON MECHANICAL STRESSES IN Mo/Si MULTILAYER X-RAY MIRRORS Open

Y. P. Pershyn, V.S. Chumak, A. Yu. Devizenko, E. N. Zubarev, В. В. Кондратенко · 2024

Materials science Physics Engineering

By the method of X-ray tensometry (=0.154 nm), the dependences of residual stresses in Mo/Si multilayer Xray mirrors (MXMs) obtained by direct-current magnetron sputtering were studied as a function of the sputtering Ar pressure in the ra…

Nonbolometric bottleneck in electron-phonon relaxation in ultrathin WSi films Open

Mariia Sidorova, A. G. Kozorezov, A. Semenov, Yu. P. Korneeva, M. Yu. Mikhaı̆lov , et al. · 2018

Materials science Computer science Physics

We developed the model of the internal phonon bottleneck to describe the\nenergy exchange between the acoustically soft ultrathin metal film and\nacoustically rigid substrate. Discriminating phonons in the film into two\ngroups, escaping a…

Scandium-silicon Multilayer X-ray Mirrors with CrB2 Barrier LayersScSiCrB Open

Y. P. Pershyn, A. Yu. Devizenko, E. N. Zubarev, В. В. Кондратенко, Dmitriy L. Voronov , et al. · 2018

Materials science Physics

Методами рентгенівської дифракції (0,154 нм), просвічувачої електронної мікроскопії поперечних зрізів і рефлектометрії в області екстремального ультрафіолету (41-51 нм) досліджені бар'єрні властивості шарів CrB2 товщиною 0.3-1.3 нм в багат…

Growth and structure of WC/Si multilayer x-ray mirror Open

Y. P. Pershyn, V.S. Chumak, I.G. Shypkova, V.V. Mamon, A. Yu. Devizenko , et al. · 2018

Materials science Physics Chemistry

WC/Si multilayer X-ray mirrors (MXMs) with nominal layers thicknesses of 0.2…30.3 nm (periods: 0.7…38.9 nm) were deposited by direct current magnetron sputtering and studied by X-ray diffraction and cross-sectional transmission electron mi…

Application of Tungsten as a Barrier Layer in Sc/Si Multilayer X-ray Mirrors Open

Y. P. Pershyn, V.S. Chumak, E. N. Zubarev, A. Yu. Devizenko, В. В. Кондратенко , et al. · 2018

Materials science Physics

Методами рентгеновской дифракции (ƛ = 0,154 нм), просвечивающей электронной микроскопии поперечных срезов и рефлектометрии в мягкой рентгеновской области (ƛ = 25-50 нм) исследованы барьерные свойства слоев вольфрама толщиной 0,1-2,1 нм в м…

Reduction of Interface Mixing in Sc/Si Multilayer X-ray Mirrors Open

Y. P. Pershyn, A. Yu. Devizenko, В. В. Кондратенко, Dmitriy L. Voronov, E. M. Gullikson · 2017

Materials science Physics Mathematics

By methods of X-ray diffraction in both hard (  0.154 nm) and soft (  11.7-50.0 nm) regions an influence of Ar pressure (1.6-2.4 mTorr) on interface mixing in Sc/Si multilayer X-ray mirrors (MXMs) during deposition is studied. Signific…

Determination of a Thickness of Layers of Multilayer Periodic Coatings by a Method of the Rutherford Backscattering Open

V. N. Kolomiyets, Iryna Kononenko, S. N. Kravchenko, M. I. Zakharets, V.E. Storizhko , et al. · 2016

Materials science Physics

Методом резерфордовского обратного рассеяния были определены толщины слоёв кобальта и углерода в многослойном периодическом покрытии [Со

Electron-phonon relaxation time in ultrathin tungsten silicon film Open

Korneev Alexander, Chulkova Galina Mercurievna, Goltsman Grigory, Mariia Sidorova, A. Semenov , et al. · 2016

Materials science Physics Computer science

We developed the model of the internal phonon bottleneck to describe the energy exchange between the acoustically soft ultrathin metal film and acoustically rigid substrate. Discriminating phonons in the film into two groups, escaping and …

Structural and X-Ray—Optical Characteristics of the W/Si Multilayer X-Ray Mirrors Open

Yurii P. Pershin, A. Yu. Devizenko, В. В. Кондратенко, Hartwig Modrow, F. J. Hormes · 2016

Materials science Physics

Методами рентгеновской дифракции в жёстком (  0,154 нм) и мягком (0,8    2,4 нм) диапазонах исследована структура и оптические свойства серии многослойных рентгеновских зеркал (МРЗ) W/Si с систематически изменяющимся периодом в диапаз…

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