Anne Kittmann
YOU?
Author Swipe
What MEMS Research and Development Can Learn from a Production Environment Open
The intricate interdependency of device design and fabrication process complicates the development of microelectromechanical systems (MEMS). Commercial pressure has motivated industry to implement various tools and methods to overcome chal…
View article: Imaging of Love Waves and Their Interaction with Magnetic Domain Walls in Magnetoelectric Magnetic Field Sensors
Imaging of Love Waves and Their Interaction with Magnetic Domain Walls in Magnetoelectric Magnetic Field Sensors Open
The complex behavior of horizontally polarized surface shear waves in magnetoelectric surface acoustic wave based magnetic field sensor devices is revealed by time‐resolved magnetooptical microscopy with picosecond temporal and submicron s…
View article: Thin-Film-Based SAW Magnetic Field Sensors
Thin-Film-Based SAW Magnetic Field Sensors Open
In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The aco…
View article: Phase Noise of SAW Delay Line Magnetic Field Sensors
Phase Noise of SAW Delay Line Magnetic Field Sensors Open
Surface acoustic wave (SAW) sensors for the detection of magnetic fields are currently being studied scientifically in many ways, especially since both their sensitivity as well as their detectivity could be significantly improved by the u…
Multi-Mode Love-Wave SAW Magnetic-Field Sensors Open
A surface-acoustic-wave (SAW) magnetic-field sensor utilizing fundamental, first- and second-order Love-wave modes is investigated. A 4.5 μ m SiO2 guiding layer on an ST-cut quartz substrate is coated with a 200 n m (Fe90Co10)78Si12B10 mag…
Noise Analysis and Comparison of Phase- and Frequency-Detecting Readout Systems: Application to SAW Delay Line Magnetic Field Sensor Open
Transmission surface acoustic wave (SAW) sensors are widely used in various fields of application. In order to maximize the limit of detection (LOD) of such sensor systems, it is of high importance to understand and to be able to quantify …