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View article: Ice Lithography: Recent Progress Opens a New Frontier of Opportunities
Ice Lithography: Recent Progress Opens a New Frontier of Opportunities Open
Ice lithography (IL) is an emerging and versatile direct write method that complements two photon lithography and focused electron beam induced deposition (FEBID). Based on interaction between energetic electrons and frozen materials, IL p…
View article: Vat photopolymerization using pulsed exposure
Vat photopolymerization using pulsed exposure Open
Vat photopolymerization (VP), a subcategory of additive manufacturing (AM), enables the fabrication of custom and intricate 3D structures essential to micro-nano engineering. However, research on VP's main parameters, irradiance and exposu…
View article: Single-Cell and Population-Level Neuromodulation Dynamics in Dual-Electrode Intracortical Stimulation
Single-Cell and Population-Level Neuromodulation Dynamics in Dual-Electrode Intracortical Stimulation Open
In neuroprosthetics, intracortical microstimulation (ICMS) recruits cortical networks to evoke brain responses and sensory perceptions. However, multi-electrode ICMS often generates suboptimal percepts compared to single-electrode ICMS, su…
View article: Field enhancement effect in reactive ion etching – a novel mechanism for plasma processing and plasma diagnostics
Field enhancement effect in reactive ion etching – a novel mechanism for plasma processing and plasma diagnostics Open
Field enhancement effect (FEE) is a physical phenomenon widely investigated in the context of field emitters and nanophotonic devices, where electromagnetic fields can be enhanced significantly at geometrically sharp boundaries. Here, we p…
View article: Precise Fabrication of Graphite-Like Material Directly on a Biological Membrane Enabled by Ethanol Ice Resist
Precise Fabrication of Graphite-Like Material Directly on a Biological Membrane Enabled by Ethanol Ice Resist Open
Ice lithography holds the potential to bridge cryogenic electron microscopy and electron-beam lithography and achieve direct high-precision functionalization of fragile biomaterials. Here we demonstrate that 5 keV electron irradiation of e…
View article: Micro‐Coil Neuromodulation at Single‐Cell and Circuit Levels for Inhibiting Natural Neuroactivity, Neutralizing Electric Neural Excitation, and Suppressing Seizures
Micro‐Coil Neuromodulation at Single‐Cell and Circuit Levels for Inhibiting Natural Neuroactivity, Neutralizing Electric Neural Excitation, and Suppressing Seizures Open
Micromagnetic stimulation (µMS) emerges as a complementary method for neuromodulation. Despite major advances in neural interface technology, there are limited options for neural inhibition. Here, a microchip‐based implantable micro‐coil d…
View article: Bioactive diamond scaffolds support neuronal survival and axonal growth
Bioactive diamond scaffolds support neuronal survival and axonal growth Open
Injury to the central nervous system (CNS) can have devastating consequences for the individual, and strategies to promote endogenous axonal regeneration may be a promising future therapeutic avenue. In the case of spinal cord injury, one …
View article: Electron beam processing of organic ice for low-toxicity submicrometer additive manufacturing
Electron beam processing of organic ice for low-toxicity submicrometer additive manufacturing Open
Two-photon lithography enables powerful nanoscale 3D printing. Unfortunately, it uses toxic photopolymers. We report a layer-by-layer digital process using condensed organic vapor thin films as the starting material. The process uses a foc…
View article: Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon
Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon Open
Microelectromechanical systems for biological purposes (BioMEMS) have shown huge potential for diagnostics, medical treatment or even augmenting certain body functions in humans. This is enabled by the high level of integration, manufactur…
View article: MEMS micro-coils for magnetic neurostimulation
MEMS micro-coils for magnetic neurostimulation Open
Micro-coil magnetic stimulation of brain tissue presents new challenges for MEMS micro-coil probe fabrication. The main challenges are threefold; (i) low coil resistance for high power efficiency, (ii) low leak current from the probe into …
View article: Ice lithography using tungsten hexacarbonyl
Ice lithography using tungsten hexacarbonyl Open
Ice lithography (IL) fabricates 2D and 3D patterns using electron-solid interaction principle. Herein, we report IL patterning of the negative tone metalorganic precursor. The precursor is condensed at 80 K. It is then patterned using a 5–…
View article: Ice lithography for 3D nanofabrication
Ice lithography for 3D nanofabrication Open
Nanotechnology and nanoscience are enabled by nanofabrication. Electron-beam lithography, which makes 2D patterns down to a few nanometers, is one of the fundamental pillars of nanofabrication. Recently, significant progress in 3D electron…
View article: Towards diamond micro four-point probes
Towards diamond micro four-point probes Open
Diamond has extreme physical properties, and it is used for critical applications in micro- and nanotechnology and nanosciences. Micro four-point probes for electrical characterization of metal and semiconductor thin-films are made from me…
View article: Effect of Molecular Weight on the Feature Size in Organic Ice Resists
Effect of Molecular Weight on the Feature Size in Organic Ice Resists Open
The feature size of patterns obtained by electron-beam lithography (EBL) depends critically on resist properties, beam parameters, development process, and instrument limitations. Frozen layers of simple organic molecules such as n-alkanes…
View article: High-<italic>Q</italic> Three-Dimensional Microfabricated Magnetic-Core Toroidal Inductors for Power Supplies in Package
High-Q Three-Dimensional Microfabricated Magnetic-Core Toroidal Inductors for Power Supplies in Package Open
The integration of power inductors is a roadblock in realizing highly miniaturized power supply in package (PSiP) and power supply on chip. Inductors in such power systems are used for energy storage and filtering, but they dominate in siz…
View article: Microfabricated Air-Core Toroidal Inductor in Very High-Frequency Power Converters
Microfabricated Air-Core Toroidal Inductor in Very High-Frequency Power Converters Open
Miniaturization of power supplies is required for future intelligent electronic systems e.g. internet of things devices. Inductors play an essential role, and they are by far the most bulky and expensive components in power supplies. This …
View article: Organic Ice Resists
Organic Ice Resists Open
Electron-beam lithography (EBL) is the backbone technology for patterning nanostructures and manufacturing nanodevices. It involves processing and handling synthetic resins in several steps, each requiring optimization and dedicated instru…