Anton Haase
YOU?
Author Swipe
View article: Reconstructing detailed line profiles of lamellar gratings from GISAXS patterns with a Maxwell solver
Reconstructing detailed line profiles of lamellar gratings from GISAXS patterns with a Maxwell solver Open
Laterally periodic nanostructures have been investigated with grazing-incidence small-angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculati…
View article: Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering
Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering Open
We investigate the influence of the Mo-layer thickness on the EUV reflectance of Mo/Si mirrors with a set of unpolished and interface-polished Mo/Si/C multilayer mirrors. The Mo-layer thickness is varied in the range from 1.7 nm to 3.05 nm…
View article: Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation
Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation Open
Multilayer mirrors for the extreme ultraviolet (EUV) spectral range are essential optical elements of next-generation lithography systems and in scientific applications, e.g. water window microscopes. Their failure so far to reach theoreti…
View article: Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements
Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements Open
Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer …
View article: Front Matter: Volume 9776
Front Matter: Volume 9776 Open
A unique citation identifier (CID) number is assigned to each article at the time of publication.Utilization of CIDs allows articles to
View article: Correlated diffuse x-ray scattering from periodically nanostructured surfaces
Correlated diffuse x-ray scattering from periodically nanostructured surfaces Open
Laterally periodic nanostructures were investigated with grazing incidence\nsmall angle X-ray scattering. To support an improved reconstruction of\nnanostructured surface geometries, we investigated the origin of the\ncontributions to the …