A. Imai
YOU?
Author Swipe
View article: Generation of two‐dimensional electron gas to normally depleted AlGaN/GaN hetero‐interface by SiO <sub>2</sub> deposition and subsequent high‐temperature annealing
Generation of two‐dimensional electron gas to normally depleted AlGaN/GaN hetero‐interface by SiO <sub>2</sub> deposition and subsequent high‐temperature annealing Open
SiO 2 film deposition and subsequent high‐temperature annealing resulted in the generation of a two‐dimensional electron gas (2DEG) at Al(Ga)N/GaN hetero‐interfaces, of which the 2DEG was originally fully depleted. The obtained mobilities …