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View article: Downsizing and Silicon Integration of Photoacoustic Gas Cells
Downsizing and Silicon Integration of Photoacoustic Gas Cells Open
Downsizing and compatibility with MEMS silicon foundries is an attractive path towards a large diffusion of photoacoustic trace gas sensors. As the photoacoustic signal scales inversely with the chamber volume, a trend to miniaturization h…
View article: Stress optic modulator using thin-film PZT for LIDAR applications
Stress optic modulator using thin-film PZT for LIDAR applications Open
International audience
View article: Low Voltage Haptic Slider Built Using Sol-Gel Thin-Film PZT Actuators Reported on Glass
Low Voltage Haptic Slider Built Using Sol-Gel Thin-Film PZT Actuators Reported on Glass Open
This paper reports on the development of a unique haptic solution based on thin-film Pb(Zr0.52,Ti0.48)O3 (PZT) actuators reported on glass substrate, allowing the feeling of textured surfaces playing with the variable friction between a fi…
View article: Development of a resonant asymmetric micro mirror using an electro active polymer actuation
Development of a resonant asymmetric micro mirror using an electro active polymer actuation Open
In this paper we present the development of a resonant asymmetric micro mirror. In particular, we prove the possibility of using an Electro Active Polymer as actuation material. The working principle of the micro mirror and the design reta…
View article: PZT Actuated MEMS Membrane Characterization and Post Simulation for Digital Loudspeaker Array Application
PZT Actuated MEMS Membrane Characterization and Post Simulation for Digital Loudspeaker Array Application Open
A Digital Loudspeaker Array (DLA) is an electro-mechanical transductor which receives a numerical signal as input data and allows the analogical conversion directly in the air. We designed PZT actuated membranes in order to obtain the high…
View article: Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators
Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators Open
This paper reports on the development of a Digital Loudspeaker Array (DLA) solution based on Pb(Zr0.52,Ti0.48)O3 (PZT) thin-film actuated membranes. These membranes called speaklets are arranged in a matrix and operate in a binary manner b…
View article: A 256 MEMS Membrane Digital Loudspeaker Array Based on PZT Actuators
A 256 MEMS Membrane Digital Loudspeaker Array Based on PZT Actuators Open
International audience