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Micro/nano devices fabricated from Cu-Hf thin films Open

Erik J. Luber, Colin Ophus, David Mitlin, Brian J. Olsen, Christopher Harrower , et al. · 2023

An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.