Dongyang Zou
YOU?
Author Swipe
View article: Fabrication of Ohmic Contact on N-Type SiC by Laser Annealed Process: A Review
Fabrication of Ohmic Contact on N-Type SiC by Laser Annealed Process: A Review Open
In recent years, because of stringent needs in the fabrication of silicon carbide (SiC) power devices, laser annealing has been introduced to achieve local ohmic contact. In this paper, the laser annealing research for the ohmic contact pr…