Florian Bonneau
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View article: Combined dry plasma etching and online metrology for manufacturing highly focusing x-ray mirrors
Combined dry plasma etching and online metrology for manufacturing highly focusing x-ray mirrors Open
A new figuring station was designed and installed at the ESRF beamline BM05. It allows the figuring of mirrors within an iterative process combining the advantage of online metrology with dry etching. The complete process takes place under…