Eberhard Manske
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View article: Near-common-optical-path two-axis surface encoder with a three-layer gratings interference method
Near-common-optical-path two-axis surface encoder with a three-layer gratings interference method Open
A near-common-optical-path two-axis surface encoder design is proposed for in-plane and out-of-plane wide-range displacement measurement. A three-layer gratings (TLGs) interference method is newly adopted in the optical design, contributin…
View article: Enhanced Vectorial Measurement Uncertainty Model
Enhanced Vectorial Measurement Uncertainty Model Open
Quantitative determination of the uncertainty of a measurement result is the key to assessing the quality and reliability of a measurement process and its result. The comparability of measurement results is ensured by the method for evalua…
View article: An integrated exposure and measurement tool for 5-DOF direct laser writing based on chromatic differential confocal sensing
An integrated exposure and measurement tool for 5-DOF direct laser writing based on chromatic differential confocal sensing Open
Accurate and uniform fabrication of microstructures on highly curved substrates requires exposure with the waist of a focused laser beam at every point. In order to realize this, the exposure beam must be held perpendicular and focused ont…
View article: Precision measurement and engineering at the 60th Ilmenau Scientific Colloquium
Precision measurement and engineering at the 60th Ilmenau Scientific Colloquium Open
The 60th Ilmenau Scientific Colloquium was held from 4th to 8th September 2023 at the Technische Universität Ilmenau in Germany. Organized by the Faculty of Mechanical Engineering under the title 'Engineering for a Changing World', it was …
View article: Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)
Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100) Open
This paper explores large area application of tip-based nanofabrication by field emission scanning probe lithography and showcases the simultaneous possibility of atomic force microscopy on macroscopic scales. This is made possible by the …
View article: Introduction and application of a new approach for model-based optical bidirectional measurements
Introduction and application of a new approach for model-based optical bidirectional measurements Open
Accurate measurements of micro- and nanoscale features in optical microscopy demand comprehensive modelling approaches. In this study, we introduce an enhanced evaluation method, utilizing rigorous simulations based on a finite element met…
View article: An integrated exposure and measurement tool for 5-DOF direct laser writing
An integrated exposure and measurement tool for 5-DOF direct laser writing Open
Accurate and uniform fabrication of microstructures on highly curved substrates requires exposure with the waist of a focused laser beam at every point. In order to realize this, the exposure beam must be held perpendicular and focused ont…
View article: Influence of the reference surface and AFM tip on the radius and roundness measurement of micro spheres
Influence of the reference surface and AFM tip on the radius and roundness measurement of micro spheres Open
The performance of tactile and optical surface sensors for nano and micro coordinate measuring machines is currently limited by the lack of precisely characterised micro spheres, since established strategies have mainly been developed for …
View article: Improved peak-to-peak method for cavity length measurement of a Fabry-Perot etalon using a mode-locked femtosecond laser
Improved peak-to-peak method for cavity length measurement of a Fabry-Perot etalon using a mode-locked femtosecond laser Open
Differing from the conventional peak-to-peak method using two neighboring spectral peaks in the frequency-domain fringe spectrum of the spectral response of a Fabry-Perot etalon to a femtosecond laser, which contains N spectral peaks equal…
View article: Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography
Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography Open
In this work, we report progress on developing a multipurpose scanning probe cantilever applying gallium nitride nanowires as the probe tip. Gallium nitride nanowires possess high potential as probes due to their straight profile, tunable …
View article: Tip-based nanofabrication below 40 nm combined with a nanopositioning machine with a movement range of Ø100 mm
Tip-based nanofabrication below 40 nm combined with a nanopositioning machine with a movement range of Ø100 mm Open
In this paper, the combination of an advanced nanopositioning technique and a tip-based system, which can be used as an atomic force microscope (AFM) and especially for field emission scanning probe lithography (FESPL) is presented. This i…
View article: A GPS-Referenced Wavelength Standard for High-Precision Displacement Interferometry at λ = 633 nm
A GPS-Referenced Wavelength Standard for High-Precision Displacement Interferometry at λ = 633 nm Open
Since the turn of the millennium, the development and commercial availability of optical frequency combs has led to a steadily increase of worldwide installed frequency combs and a growing interest in using them for industrial-related metr…
View article: A feasibility study towards traceable calibration of size and form of microspheres by stitching AFM images using ICP point-to-plane algorithm
A feasibility study towards traceable calibration of size and form of microspheres by stitching AFM images using ICP point-to-plane algorithm Open
We present a new method for traceable calibration of size and form error of microspheres, which was realised by stitching a series of atomic force microscopic (AFM) images measured at different orientations of microspheres using the metrol…
View article: In situ, back-focal-plane-based determination of the numerical apertures in optical microscopes
In situ, back-focal-plane-based determination of the numerical apertures in optical microscopes Open
In this contribution, we present a technique for in situ determination of the numerical apertures (NAs) of optical microscopes using calibrated diffraction gratings. Many commonly practiced procedures use an external setup to determine the…
View article: Absolute distance measurements for in-situ interferometer characterisation using range-resolved interferometry
Absolute distance measurements for in-situ interferometer characterisation using range-resolved interferometry Open
Range-resolved interferometry (RRI) allows the simultaneous demodulation of multiple interferometric signal sources and provides a tomographic view of all constituent interferometers that may be present in a setup. Through comparison with …
View article: Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm
Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm Open
This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the …
View article: Silicon Carbide - Graphene Nano-Gratings on 4H and 6H Semi-Insulating SiC
Silicon Carbide - Graphene Nano-Gratings on 4H and 6H Semi-Insulating SiC Open
A technical methodology of fabrication of hierarchically scaled multitude graphene nanogratings with varying pitches ranging from the micrometer down to sub 40 nm scale combined with sub 10 nm step heights on 4H and 6H semi-insulating SiC …
View article: The 6th edition of Nanotech France 2021 International Conference Proceedings
The 6th edition of Nanotech France 2021 International Conference Proceedings Open
This work presents the approach of directly stabilizing the metrology lasers of a long-range nanopositioning and measuring machine to an optical frequency comb.The frequency comb is referenced to a GPS disciplined oscillator.This way a dir…
View article: Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control
Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control Open
This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm.…
View article: In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser
In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser Open
Major modifications are made to the setup and signal processing of the method of in-situ measurement of the pitch of a diffraction grating based on the angles of diffraction of the diffracted optical frequency comb laser emanated from the …
View article: Heterodyne Standing-Wave Interferometer with Improved Phase Stability
Heterodyne Standing-Wave Interferometer with Improved Phase Stability Open
This paper describes a standing-wave interferometer with two laser sources of different wavelengths, diametrically opposed and emitting towards each other. The resulting standing wave has an intensity profile which is moving with a constan…
View article: Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)
Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100) Open
This contribution deals with the analysis of the positioning accuracy of a new Nano Fabrication Machine. This machine uses a planar direct drive system and has a positioning range up to 100 mm in diameter. The positioning accuracy was inve…
View article: Rigorous 3D modeling of confocal microscopy on 2D surface topographies
Rigorous 3D modeling of confocal microscopy on 2D surface topographies Open
Although optical 3D topography measurement instruments are widespread, measured profiles suffer from systematic deviations occurring due to the wave characteristics of light. These deviations can be analyzed by numerical simulations. We pr…
View article: A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements
A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements Open
As standard concepts for precision positioning within a machine reach their limits with increasing measurement volumes, inverse concepts are a promising approach for addressing this problem. The inverse principle entails other limitations,…
View article: Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes
Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes Open
The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This in combination with the specific nature of sensors and tools limits the addressable p…