Edward KF Chan
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View article: TRENCH-ISOLATED BULK-TYPE PRESSURE SENSOR ON SILICON-ON-INSULATOR FOR HIGH-TEMPERATURE AND HIGH-PRESSURE DOWNHOLE APPLICATIONS
TRENCH-ISOLATED BULK-TYPE PRESSURE SENSOR ON SILICON-ON-INSULATOR FOR HIGH-TEMPERATURE AND HIGH-PRESSURE DOWNHOLE APPLICATIONS Open
Presently reported is a dielectric-isolated bulk-type pressure sensor fabricated on silicon-on-insulator (SOI) that offers higher pressure capability than conventional diaphragm-type pressure sensors and wider temperature operating range t…