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View article: Artificial neural network assisted spectral scatterometry for grating quality control
Artificial neural network assisted spectral scatterometry for grating quality control Open
Spectral scatterometry is a technique that allows rapid measurements of diffraction efficiencies of diffractive optical elements (DOEs). The analysis of such diffraction efficiencies has traditionally been laborious and time consuming. How…
View article: Phase-stepping interferometry for parallelism measurement of step gauge faces
Phase-stepping interferometry for parallelism measurement of step gauge faces Open
The article presents a measurement method driven with a non-contact optical system consisting of a mirror array by employing phase stepping interferometry to determine the surface parallelism of step gauge faces. The array houses a prism m…
View article: Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty
Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty Open
Optical measurement of large freeform samples is often limited by the resolution, size and slope limits of measurement devices. This trade-off can be solved using stitching—which, however, creates several difficulties often linked to accur…
View article: Characterization and Monte Carlo evaluation of positioning uncertainty of an MAFM
Characterization and Monte Carlo evaluation of positioning uncertainty of an MAFM Open
Nanometrin skaalan pituus-mittaukset pohjautuvat jäljitettävyyteen, ja SI-järjestelmän metriin. Atomivoimamikroskooppeja (AFM) käytetään pintojen mittaukseen alle nanometrin erottelukyvyllä. Metrologiset AFM:t (MAFM:t) käyttävät interferom…