Jonathan Pradelles
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View article: Roughness measurement of 2D curvilinear patterns: challenges and advanced methodology
Roughness measurement of 2D curvilinear patterns: challenges and advanced methodology Open
International audience
View article: Determining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions
Determining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions Open
International audience
View article: Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach Open
International audience