Juan Sebastian Fischer Calderón
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View article: A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements
A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements Open
As standard concepts for precision positioning within a machine reach their limits with increasing measurement volumes, inverse concepts are a promising approach for addressing this problem. The inverse principle entails other limitations,…