Jun Gotoh
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View article: 67‐2: Adoption of Blue Light Semiconductor Laser Diode (BLDA) in LTPS TFT Manufacturing
67‐2: Adoption of Blue Light Semiconductor Laser Diode (BLDA) in LTPS TFT Manufacturing Open
We have investigated adoption of CW blue laser diode annealing (BLDA) in manufacturing process of LTPS TFT backplane. Our experiments have shown that except crystallization annealing, BLDA can be adopted in dehydrogenation of precursor amo…
View article: 34.1: <i>Invited Paper:</i> The laser annealing for crystallization of amorphous silicon using blue light semiconductor laser
34.1: <i>Invited Paper:</i> The laser annealing for crystallization of amorphous silicon using blue light semiconductor laser Open
Semiconductor blue laser diode was used for crystallization annealing of amorphous silicon of backplane of flat panel display. The grain size of result crystal can be controlled by laser beam intensity or beam scanning speed. The poly sili…
View article: Unseeded Crystal Growth of (100)-Oriented Grain-Boundary-Free Si Thin-Film by a Single Scan of the CW-Laser Lateral Crystallization of a-Si on Insulator
Unseeded Crystal Growth of (100)-Oriented Grain-Boundary-Free Si Thin-Film by a Single Scan of the CW-Laser Lateral Crystallization of a-Si on Insulator Open
Laser crystallization of a-Si film on insulating substrate is a promising technology to fabricate three-dimensional integrations (3D ICs), flat panel displays (FPDs), or flexible electronics, because the crystallization can be performed on…