Junichi Kosugi
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View article: 34.1: <i>Invited Paper:</i> The laser annealing for crystallization of amorphous silicon using blue light semiconductor laser
34.1: <i>Invited Paper:</i> The laser annealing for crystallization of amorphous silicon using blue light semiconductor laser Open
Semiconductor blue laser diode was used for crystallization annealing of amorphous silicon of backplane of flat panel display. The grain size of result crystal can be controlled by laser beam intensity or beam scanning speed. The poly sili…