Kouichiro Kouge
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View article: Observation of plasma inflows in laser-produced Sn plasma and their contribution to extreme-ultraviolet light output enhancement
Observation of plasma inflows in laser-produced Sn plasma and their contribution to extreme-ultraviolet light output enhancement Open
View article: Discovery of plasma inflows in laser-produced Sn plasmas contributing to increment of extreme-ultraviolet light output
Discovery of plasma inflows in laser-produced Sn plasmas contributing to increment of extreme-ultraviolet light output Open
Plasma dynamics are governed not only by temperature and density but also by macroscopic flows. However, velocity fields ( v flow ) inside laser-produced plasmas (LPPs) have rarely been measured, owing to their small size (< 1 mm) and shor…
View article: Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field
Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field Open
Gigaphoton Inc. has been developing a CO2-Sn-LPP (LPP: Laser Produced Plasma) extreme ultraviolet (EUV) light source system for high-volume manufacturing (HVM) semiconductor lithography. Key components of the source include a high-power CO…
View article: Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources
Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources Open