L. Mollard
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View article: Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance
Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance Open
This work presents the results obtained with potassium sodium niobate (KNN) biaxial non-resonant microelectromechanical systems (MEMS) mirrors manufactured on a 200 mm silicon substrate. These MEMS mirrors feature various reflector dimensi…
View article: Thermal Behavior of Biaxial Piezoelectric MEMS Scanner
Thermal Behavior of Biaxial Piezoelectric MEMS Scanner Open
This paper presents the thermal behavior of a non-resonant (quasi-static) biaxial piezoelectric MEMS scanner [...]
View article: A Lumped Element model for biaxial MEMS scanners
A Lumped Element model for biaxial MEMS scanners Open
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View article: Piezoelectric Layer Transfer Process for MEMS
Piezoelectric Layer Transfer Process for MEMS Open
Piezoelectric MEMS devices were fabricated on 200 mm Si wafers using both deposited and layer-transferred PZT films. In both cases, the PZT-based devices showed ferroelectric and piezoelectric properties at the level of current state-of-th…
View article: Active optical phased array integrated within a micro-cantilever
Active optical phased array integrated within a micro-cantilever Open
Using wafer level fabrication techniques, we combine silicon photonics and MEMS technologies to demonstrate the integration of an active photonic beam-steering circuit into a piezoelectric actuated micro cantilever. An optical phased array…
View article: Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners
Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners Open
This paper presents the thermal behavior of non-resonant (quasi-static) piezoelectric biaxial MEMS scanners with Bragg reflectors. These scanners were developed for LIDAR (LIght Detection And Ranging) applications using a pulsed 1550 nm la…
View article: Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR
Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR Open
This paper presents the fabrication and characterization of a biaxial MEMS (MicroElectroMechanical System) scanner based on PZT (Lead Zirconate Titanate) which incorporates a low-absorption dielectric multilayer coating, i.e., a Bragg refl…
View article: HgCdTe APDS for space applications
HgCdTe APDS for space applications Open
HgCdTe avalanche photodiode focal plane arrays (FPAs) and single element detectors have been developed for a large scope of photon starved applications. The present communication present the characteristics of our most recent detector deve…