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View article: 62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators Open
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried platinum (Pt) bottom electrode, positioned above an acoust…
View article: Thermal Endurance of Suspended Thin-Film Lithium Niobate up to 800 °C
Thermal Endurance of Suspended Thin-Film Lithium Niobate up to 800 °C Open
The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, piezoelectric MEMS devices are expected to sustain severe da…
View article: An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges Open
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electrodes, and uses it as a quantitative case study of the limits…
View article: 50 GHz Piezoelectric Acoustic Filter
50 GHz Piezoelectric Acoustic Filter Open
This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric thin-films of alternating orientations are transferred in seq…
View article: Acoustic resonators above 100 GHz
Acoustic resonators above 100 GHz Open
Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics push to millimeter waves frequencies, designers must increase …
View article: Transferred Thin Film Lithium Niobate as Millimeter Wave Acoustic Filter Platforms
Transferred Thin Film Lithium Niobate as Millimeter Wave Acoustic Filter Platforms Open
This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3). By transferring LiNbO3 on the top of silicon (Si) and sapphire (Al2O3…
View article: Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW Open
This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic re…
View article: Towards Controlled Transfer of (001) β-Ga<sub>2</sub>O<sub>3</sub> to (0001) 4H-SiC Substrates
Towards Controlled Transfer of (001) β-Ga<sub>2</sub>O<sub>3</sub> to (0001) 4H-SiC Substrates Open
We demonstrate successful surface blistering of He-implanted (001) β-Ga 2 O 3 substrates, bonding to (0001) 4H-SiC, and initial results towards large-area transfer of (001) β-Ga 2 O 3 to 4H-SiC. Surface blistering of unbonded, implanted su…
View article: The onset of selective laser flash sintering in undoped and doped lanthanum chromite
The onset of selective laser flash sintering in undoped and doped lanthanum chromite Open
Previous studies have shown that selective laser flash sintering (SLFS) can be initiated in dielectrics that exhibit ionic or electronic conduction at high temperature. These materials required high laser powers to reach the temperatures w…
View article: Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k2 of 5.1% at 50.74 GHz
Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k2 of 5.1% at 50.74 GHz Open
This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator empl…
View article: Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz with 2.38 dB IL and 18.2% FBW
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz with 2.38 dB IL and 18.2% FBW Open
This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic re…