M. Kammler
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View article: Directed Self-Assembly of Ge Quantum Dots Using Focused Si2+ Ion Beam Patterning
Directed Self-Assembly of Ge Quantum Dots Using Focused Si2+ Ion Beam Patterning Open
We show that templating a Si surface with a focused beam of Si 2+ or Si + ions can create suitable nucleation sites for the subsequent growth of self-assembled Ge quantum dots by chemical vapor deposition. To determine the mechanism of pat…