Maarten P. Boer
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View article: Inhomogeneities in directed energy deposition of refractory metals with widely different melting temperatures and mass densities
Inhomogeneities in directed energy deposition of refractory metals with widely different melting temperatures and mass densities Open
View article: A reversible solvent segregation transition at grain boundaries in gold-platinum alloys
A reversible solvent segregation transition at grain boundaries in gold-platinum alloys Open
View article: Anisotropic reactive ion etching of 2.5 micrometer thick alpha phase tantalum films for surface micromachining
Anisotropic reactive ion etching of 2.5 micrometer thick alpha phase tantalum films for surface micromachining Open
An etch parameter study is conducted with the objective of achieving high anisotropy for tantalum (Ta) thin films of more than 1 μm in thickness. The gases explored are Argon (Ar), carbon tetrafluoride (CF4) and oxygen. The effects of comp…
View article: Constraint Active Search in Process Window Optimization for Powder Feed Directed Energy Deposition
Constraint Active Search in Process Window Optimization for Powder Feed Directed Energy Deposition Open
Optimizing process parameters for directed energy deposition is crucial to achieve high-quality printed parts. However, this optimization process often entails significant time and cost investments. An initial investigation into the proces…
View article: Optimization Study of Rare Earth-Free Metal Amorphous Nanocomposite Axial Flux-Switching Permanent Magnet Motor
Optimization Study of Rare Earth-Free Metal Amorphous Nanocomposite Axial Flux-Switching Permanent Magnet Motor Open
Metal amorphous nanocomposite (MANC) soft magnetic materials exhibit remarkably low iron loss and high saturation magnetization. However, they have not been widely used in electric motors largely due to a lack of demonstrated manufacturing…
View article: A Reversible Solvent Segregation Transition at Grain Boundaries in Gold-Platinum Alloys
A Reversible Solvent Segregation Transition at Grain Boundaries in Gold-Platinum Alloys Open
View article: Anisotropic Reactive Ion Etching of 2.5 Μm Thick Α-Ta Films for Surface Micromachining
Anisotropic Reactive Ion Etching of 2.5 Μm Thick Α-Ta Films for Surface Micromachining Open
View article: Anisotropic Reactive Ion Etching of 2.5 Micrometer Thick Alpha Phase Tantalum Films for Surface Micromachining
Anisotropic Reactive Ion Etching of 2.5 Micrometer Thick Alpha Phase Tantalum Films for Surface Micromachining Open
View article: Oxygen diffusion in freestanding body centered cubic tantalum structural thin films in air and in high vacuum
Oxygen diffusion in freestanding body centered cubic tantalum structural thin films in air and in high vacuum Open
View article: Demonstration and Analysis of Conditions to Obtain a High Strength Inconel 625 to Stainless Steel 304L Interface by Directed Energy Deposition
Demonstration and Analysis of Conditions to Obtain a High Strength Inconel 625 to Stainless Steel 304L Interface by Directed Energy Deposition Open
Functional grading (FG) is often used to bond dissimilar metals. However, that approach is complicated from a manufacturing perspective, and the associated challenges can outweigh the benefits of FG. Here, we investigate a directly bonded …
View article: Low voltage cold and hot switching in nanoswitches cleaned by <i>in situ</i> oxygen plasma can achieve low stable contact resistance
Low voltage cold and hot switching in nanoswitches cleaned by <i>in situ</i> oxygen plasma can achieve low stable contact resistance Open
Reliable nanoswitch operation requires low contact voltages and stable electrical contact resistance (ECR). Surface cleanliness is crucial to prevent nanomechanical switch failure, which can occur due to the presence of insulating adventit…
View article: Investigation of metal amorphous nanocomposite soft magnetic alloys in the (FexNiyCo100−x-y)80B14Nb4Si2 system
Investigation of metal amorphous nanocomposite soft magnetic alloys in the (FexNiyCo100−x-y)80B14Nb4Si2 system Open
Following reports of attractive soft magnetic performance of an (Fe70Ni30)80B14Nb4Si2 alloy [1]–[3], improvement to this alloy is sought through substitution of small percen…
View article: Strength distributions of laminated FeNi-based metal amorphous nanocomposite ribbons
Strength distributions of laminated FeNi-based metal amorphous nanocomposite ribbons Open
Metal Amorphous Nanocomposite (MANC) materials offer low losses at high magnetic switching frequency, enabling high power density motors with increased rotational speed. While MANCs have high strength, they are brittle. The use of motor co…
View article: Die singulation method and package formed thereby
Die singulation method and package formed thereby Open
A method is disclosed for singulating die from a substrate having a sacrificial layer and one or more device layers, with a retainer being formed in the device layer(s) and anchored to the substrate. Deep Reactive Ion Etching (DRIE) etchin…
View article: Electrostatic apparatus for measurement of microfracture strength
Electrostatic apparatus for measurement of microfracture strength Open
A new class of materials testing apparatus has been invented. Particularly suited to the measurement of fracture and fatigue properties in the extremely strong materials encountered in microelectromechanical systems, material strains well …
View article: Long working distance incoherent interference microscope
Long working distance incoherent interference microscope Open
A full-field imaging, long working distance, incoherent interference microscope suitable for three-dimensional imaging and metrology of MEMS devices and test structures on a standard microelectronics probe station. A long working distance …
View article: Experimental insights into adhesion and friction between nominally dry rough surfaces
Experimental insights into adhesion and friction between nominally dry rough surfaces Open
Adhesion and friction between solids in ambient air control applications such as precision positioning and traction of tires. For all practical surfaces, the interfaces between solids are rough. Contact occurs at nano- or micro-contact jun…
View article: Investigation of Metal Amorphous Nanocomposite Soft Magnetic Alloys in the (Fexniyco100-X-Y)80b14nb4si2 System
Investigation of Metal Amorphous Nanocomposite Soft Magnetic Alloys in the (Fexniyco100-X-Y)80b14nb4si2 System Open
View article: Modeling and Measuring the Stress Distribution in Soft Magnetic Cores due to Epoxy Impregnation and Curing
Modeling and Measuring the Stress Distribution in Soft Magnetic Cores due to Epoxy Impregnation and Curing Open
Understanding the effects of viscoelastic relaxation of stresses is critical in electric motor and inductor applications, where the magnetic material is fully or partially comprised of an amorphous phase and impregnated in an epoxy. Magnet…
View article: Ribbon Wrinkling Origin and Its Effect on Tape-Wound Core Shape
Ribbon Wrinkling Origin and Its Effect on Tape-Wound Core Shape Open
Improved understanding of advanced manufacturing techniques is needed to fabricate next- generation soft magnetic tape-wound cores. These utilize metal amorphous nano-composites (MANCs) in the form of long thin ribbons. MANCs exhibit attra…
View article: Demonstration of tantalum as a structural material for MEMS thermal actuators
Demonstration of tantalum as a structural material for MEMS thermal actuators Open
This work demonstrates the processing, modeling, and characterization of nanocrystalline refractory metal tantalum (Ta) as a new structural material for microelectromechanical system (MEMS) thermal actuators (TAs). Nanocrystalline Ta films…
View article: Creep of a thermally stable nanocrystalline nickel tungsten alloy as measured by high temperature nanoindentation
Creep of a thermally stable nanocrystalline nickel tungsten alloy as measured by high temperature nanoindentation Open
The creep behavior of pure nanocrystalline (nc) fcc metals has not been studied above 200 °C because the nanoscale grains tend to grow at temperatures moderately above ambient. In this work, we study the creep of nanocrystalline Ni–W (nc N…
View article: Origins of thin film delamination induced by electrodeposition and processing methods to overcome it
Origins of thin film delamination induced by electrodeposition and processing methods to overcome it Open
Electrodeposition is widely used to deposit films in technological applications, but when the current efficiency is low, injected hydrogen can strongly affect the materials properties of an underlying film including its residual stress, ad…
View article: Preparing and Mounting Polymer Nanofibers onto Microscale Test Platforms
Preparing and Mounting Polymer Nanofibers onto Microscale Test Platforms Open
Because they can achieve a high degree of molecular chain alignment in comparison with their bulk counterparts, the mechanical and thermal properties of polymer nanofibers are of great interest. However, due to their nanometer-scale size, …
View article: Crystalline polymer nanofibers with ultra-high strength and thermal conductivity
Crystalline polymer nanofibers with ultra-high strength and thermal conductivity Open
View article: Micro- and Nanoscale Mechanical Testing.
Micro- and Nanoscale Mechanical Testing. Open
View article: Testing of Pt- and Ru-coated thermally actuated microrelays in an ultra-high purity environment.
Testing of Pt- and Ru-coated thermally actuated microrelays in an ultra-high purity environment. Open
View article: Van der Waals and Capillary Adhesion of Microelectromechanical Systems.
Van der Waals and Capillary Adhesion of Microelectromechanical Systems. Open