Marcus Turowski
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View article: Simulation in thin film technology
Simulation in thin film technology Open
Simulation and modeling find more and more their way into thin film technology. Beside theoretical models for layer design, pre-production design analysis, and real time process control, atomistic simulation techniques gain of importance. …
View article: Multiple scale modeling of Al2O3 thin film growth in an ion beam sputtering process
Multiple scale modeling of Al2O3 thin film growth in an ion beam sputtering process Open
A multiple scale model approach is presented in order to investigate Al2O3 thin film growth in the framework of an existing Ion Beam Sputtering (IBS) coating process. Therefore, several simulation techniques are combined via optimized inte…