N. Barniol
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Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images Open
This paper presents a fully integrated pitch-matched PMUTs-on-CMOS array with high potential in catheter-based ultrasound imaging systems and capabilities to obtain resolutions under 100 μm. The system-on-chip consists of 7x7 AlScN PMUTs c…
Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection Open
This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a c…
Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process Open
In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound transducers (PMUTs) monolithically integrated over a CMOS technology are developed. Higher acoustic pressure is produced by PMUTs with a thin layer …
Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth Open
This paper presents a multielement annular ring ultrasound transducer formed by individual high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision axial focalization and high-performance ultrasound imaging.…
High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation Open
Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-dis…
Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator Open
Novel Si-based nanosize mechanical resonator has been top-down fabricated. The shape of the resonating body has been numerically derived and consists of seven star-polygons that form a fractal structure. The actual resonator is defined by …
Miniaturized 0.13-μm CMOS Front-End Analog for AlN PMUT Arrays Open
This paper presents an analog front-end transceiver for an ultrasound imaging system based on a high-voltage (HV) transmitter, a low-noise front-end amplifier (RX), and a complementary-metal-oxide-semiconductor, aluminum nitride, piezoelec…
Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications Open
This article presents a fully integrated ultrasound system based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm complementary metal oxide semiconductor (CMOS) process analog fr…
Squared PMUT with Enhanced Pressure Sensitivities Open
This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another ou…
High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer Open
In this paper, a seesaw torsional relay monolithically integrated in a standard 0.35 μm complementary metal oxide semiconductor (CMOS) technology is presented. The seesaw relay is fabricated using the Back-End-Of-Line (BEOL) layers availab…
Ultimate Limits of Differential Resonant MEMS Sensors Based on Two Coupled Linear Resonators Open
In this paper, we investigate how additive noise, e.g., thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two passively coupled linear resonators. Existing work suggests that the ultim…
Resolution of phase difference and frequency measurements of mutually injection-locked oscillators for resonant sensing applications Open
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Impact of output metric on the resolution of mode-localized MEMS resonant sensors Open
In this paper, we investigate how additive noise, e.g. thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two weakly-coupled resonators. Existing work suggests that the resolution of th…
Monolithic integration of mutually injection-locked CMOS-MEMS oscillators for differential resonant sensing applications Open
Differential architectures based on two injection-locked MEMS oscillators are a promising technique for high-end resonant sensing applications since they enable environmental drift rejection and high sensitivity. But properly coupling two …
Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors Open
Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequ…
Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry Open
We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with c…
CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology Open
This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experiment…