Nanhao Zhao
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View article: Slurry injection schemes based on flow field distribution during chemical mechanical polishing process
Slurry injection schemes based on flow field distribution during chemical mechanical polishing process Open
View article: Study on Groove Structure Design and Flow Field Characteristics of CMP Polishing Pad Based on Multi-Scale Simulation
Study on Groove Structure Design and Flow Field Characteristics of CMP Polishing Pad Based on Multi-Scale Simulation Open