Nizan Kenane
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View article: Dry Deposition and Dry Development of Metal Oxide Based Photoresist
Dry Deposition and Dry Development of Metal Oxide Based Photoresist Open
Herein, we present high-resolution EUV patterning results achieved using Lam Research's negative-tone metal-oxide-based photoresist. We enable an entirely dry resist process flow by employing both the deposition and the development in the …
View article: CCDC 1992435: Experimental Crystal Structure Determination
CCDC 1992435: Experimental Crystal Structure Determination Open
An entry from the Cambridge Structural Database, the world’s repository for small molecule crystal structures. The entry contains experimental data from a crystal diffraction study. The deposited dataset for this entry is freely available …