Norbert Lang
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View article: Effect of Si contamination of a reactor on the determination of surface loss coefficients of hydrogen atoms
Effect of Si contamination of a reactor on the determination of surface loss coefficients of hydrogen atoms Open
Surface loss coefficients of hydrogen atoms (H) are of great importance, in particular, for numerical simulations of industrial plasma processes. In this work, the surface loss coefficient of H atoms was obtained for stainless steel and tu…
View article: Precision spectroscopy of non-thermal molecular plasmas using mid-infrared optical frequency comb Fourier transform spectroscopy
Precision spectroscopy of non-thermal molecular plasmas using mid-infrared optical frequency comb Fourier transform spectroscopy Open
Non-thermal molecular plasmas play a crucial role in numerous industrial processes and hold significant potential for driving essential chemical transformations. Accurate information about the molecular composition of the plasmas and the d…
View article: Dual-comb spectroscopy of ammonia formation in non-thermal plasmas
Dual-comb spectroscopy of ammonia formation in non-thermal plasmas Open
Plasma-activated chemical transformations promise the efficient synthesis of salient chemical products. However, the reaction pathways that lead to desirable products are often unknown, and key quantum-state-resolved information regarding …
View article: Precision spectroscopy of non-thermal molecular plasmas using mid-infrared optical frequency comb Fourier transform spectroscopy
Precision spectroscopy of non-thermal molecular plasmas using mid-infrared optical frequency comb Fourier transform spectroscopy Open
Non-thermal molecular plasmas play a crucial role in numerous industrial processes and hold significant potential for driving essential chemical transformations. Accurate information about the molecular composition of the plasmas and the d…
View article: Dual-comb Spectroscopy of Ammonia Formation in Non-thermal Plasmas
Dual-comb Spectroscopy of Ammonia Formation in Non-thermal Plasmas Open
Plasma-activated chemical transformations promise the efficient synthesis of salient chemical products. However, the reaction pathways that lead to desirable products are often unknown, and key quantum-state-resolved information regarding …
View article: Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance
Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance Open
A self-consistent fluid model has been successfully developed and employed to model an electron cyclotron resonance driven hydrogen plasma at low pressure. This model has enabled key insights to be made on the mutual interaction of microwa…
View article: Evidence of the dominant production mechanism of ammonia in a hydrogen plasma with parts per million of nitrogen
Evidence of the dominant production mechanism of ammonia in a hydrogen plasma with parts per million of nitrogen Open
Absolute ground state atomic hydrogen densities were measured, by the utilization of two-photon absorption laser induced fluorescence, in a low-pressure electron cyclotron resonance plasma as a function of nitrogen admixtures—0 to 5000 ppm…
View article: On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes
On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes Open
The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma tre…
View article: RES-Q-Trace: A Mobile CEAS-Based Demonstrator for Multi-Component Trace Gas Detection in the MIR
RES-Q-Trace: A Mobile CEAS-Based Demonstrator for Multi-Component Trace Gas Detection in the MIR Open
Sensitive trace gas detection plays an important role in current challenges occurring in areas such as industrial process control and environmental monitoring. In particular, for medical breath analysis and for the detection of illegal sub…
View article: Laser-Based Spectroscopy Diagnosis and Detailed Numerical Models to Gain Understanding on the Slow Pyrolysis Behavior of Thermally Thick Wood Particles
Laser-Based Spectroscopy Diagnosis and Detailed Numerical Models to Gain Understanding on the Slow Pyrolysis Behavior of Thermally Thick Wood Particles Open
The slow pyrolysis behaviour of thermally thick wood particles is investigated at 5, 10 and 20 °C/min, combining an advanced single-particle experimental approach with a detailed numerical model. Infrared laser absorption spectroscopy (IRL…
View article: Applying Quantum Cascade Laser Spectroscopy in Plasma Diagnostics
Applying Quantum Cascade Laser Spectroscopy in Plasma Diagnostics Open
The considerably higher power and wider frequency coverage available from quantum cascade lasers (QCLs) in comparison to lead salt diode lasers has led to substantial advances when QCLs are used in pure and applied infrared spectroscopy. F…
View article: Sensitive CH_4 detection applying quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy
Sensitive CH_4 detection applying quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy Open
We report on sensitive detection of atmospheric methane employing quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy (OF-CEAS). An instrument has been built utilizing a continuous-wave distributed feedback…