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MOVPE growth of AlGaAs/GaAs and InGaP/GaAs structures on patterned GaAs substrates Open

R. Kúdela, P. Strinchovanec, D. Gregušová, V. Cambel, J. Šoltýs , et al. · 2015

Introduction. Overgrowth of GaAs patterned substrates by MOVPE with AlGaAs or InGaP layers is an important step infabrication of advanced semiconductor structures. This problem was studied by several authors in the past [1−5 ]. Influence o…