Paul Philipp Wellmann
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View article: An Atomistic Picture of Buildup and Degradation Reactions in Area-Selective Atomic Layer Deposition with a Small Molecule Inhibitor
An Atomistic Picture of Buildup and Degradation Reactions in Area-Selective Atomic Layer Deposition with a Small Molecule Inhibitor Open
We investigate the blocking layer formation of the trimethoxypropylsilane small molecule inhibitor (SMI), its blocking mechanisms, and all relevant blocking layer disintegration reactions on SiO2 in the area-selective atomic layer depositi…
View article: An atomistic picture on build-up and degradation reactions in area-selective atomic layer deposition with a small molecule inhibitor
An atomistic picture on build-up and degradation reactions in area-selective atomic layer deposition with a small molecule inhibitor Open
We investigate the blocking layer formation of the trimethoxypropylsilane small molecule inhibi-tor (SMI), its blocking mechanisms, and all relevant blocking layer disintegration reactions on SiO2 in the area-selective atomic layer deposit…