Peter Lomax
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View article: Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography Open
Grayscale lithography allows the creation of micrometer-scale features with spatially-controlled height in a process that is fully compatible with standard lithography. Here, solid immersion lenses are demonstrated in silicon carbide using…