Peter Staffeld
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View article: Improved Electronic Transport in Ion Complexes of Crown Ether Based Columnar Liquid Crystals
Improved Electronic Transport in Ion Complexes of Crown Ether Based Columnar Liquid Crystals Open
The Li+- and K+-complexes of new discotic mesogens, where two n-alkoxy-substituted triphenylene cores are connected by a central crown ether (12-crown-4 and 18-crown-6), provide interesting structural and electronic properties. The inter- …
View article: Multilayer Micromechanics Process with Thick Functional Layers (EPyC40)
Multilayer Micromechanics Process with Thick Functional Layers (EPyC40) Open
The EPyC process (Epi-Poly-Cycle) (by Robert Bosch GmbH) opens up unique opportunities for manufacturing complex 3D MEMS structures having high effectiveness in small space. EPyC40 is an EPyC process with up to 40 μm thick polysilicon laye…
View article: Silicon Sacrificial Layer Technology for the Production of 3D MEMS (EPyC Process)
Silicon Sacrificial Layer Technology for the Production of 3D MEMS (EPyC Process) Open
The EPyC process uses silicon sacrificial layer technology, which makes it possible to generate high volume sacrificial structures of up to 100 microns thickness. The biggest challenge is the rapid and complete removal of the 3D sacrificia…