Pin-Jui Chen
YOU?
Author Swipe
View article: Investigation of 5-nm-Thick Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Ferroelectric FinFET Dimensions for Sub-60-mV/Decade Subthreshold Slope
Investigation of 5-nm-Thick Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Ferroelectric FinFET Dimensions for Sub-60-mV/Decade Subthreshold Slope Open
In this study, ferroelectric Fin field effect transistors (Fe-FinFET) with 5-nm-thick Hf0.5Zr0.5O2 (HZO) layers on silicon-on-insulator substrates were experimentally demonstrated. These devices had completed dimensions of single channel w…