Thomas Lisec
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View article: PowderMEMS® magnets as enabler for miniaturized NV based quantum sensors and quantum processor architectures
PowderMEMS® magnets as enabler for miniaturized NV based quantum sensors and quantum processor architectures Open
The implementation of PowderMEMS® micromagnets of varying shapes, with lateral dimensions of 700 μm and 800 μm, into 2.3 × 2.3 × 0.525 mm3 silicon chips has been demonstrated successfully. These chips have been utilized as functionalized i…
View article: Wafer-level chip-scale packaging of MEMS environmental sensors by functionalized porous PowderMEMS<sup>®</sup> micro-filters
Wafer-level chip-scale packaging of MEMS environmental sensors by functionalized porous PowderMEMS<sup>®</sup> micro-filters Open
MEMS environmental sensors, including pressure, gas, and humidity sensors, require protection from mechanical damage, particle exposure, and condensing moisture, while maintaining their ability to exchange gases with the environment. This …
View article: Gas Permeable Protection Caps for Wafer Level Chip Scale Packaging (WLCSP) of MEMS Environmental Sensors
Gas Permeable Protection Caps for Wafer Level Chip Scale Packaging (WLCSP) of MEMS Environmental Sensors Open
This work presents new porous environmental protection caps designed for wafer level chip scale packaging (WLCSP) of MEMS environmental sensors. The caps consist of gaspermeable microstructures formed from loose aluminum oxide powder solid…
View article: Towards Robust Thermal MEMS: Demonstration of a Novel Approach for Solid Thermal Isolation by Substrate-Level Integrated Porous Microstructures
Towards Robust Thermal MEMS: Demonstration of a Novel Approach for Solid Thermal Isolation by Substrate-Level Integrated Porous Microstructures Open
Most current thermal MEMS use fragile structures such as thin-film membranes or microcantilevers for thermal isolation. To increase the robustness of these devices, solid thermal insulators that are compatible with MEMS cleanroom processin…
View article: Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies
Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies Open
Energy harvesting and storage is highly demanded to enhance the lifetime of autonomous systems, such as IoT sensor nodes, avoiding costly and time-consuming battery replacement. However, cost efficient and small-scale energy harvesting sys…
View article: Investigation of Wafer-Level Fabricated Permanent Micromagnets for MEMS
Investigation of Wafer-Level Fabricated Permanent Micromagnets for MEMS Open
Monolithic integration of permanent micromagnets into MEMS structures offers many advantages in magnetic MEMS applications. A novel technique called PowderMEMS, based on the agglomeration of micron-sized powders by atomic layer deposition …
View article: PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures
PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures Open
A comprehensive overview of PowderMEMS—a novel back-end-of-line-compatible microfabrication technology—is presented in this paper. The PowderMEMS process solidifies micron-sized particles via atomic layer deposition (ALD) to create three-d…
View article: High Temperature Magnetic Cores Based on PowderMEMS Technique for Integrated Inductors with Active Cooling
High Temperature Magnetic Cores Based on PowderMEMS Technique for Integrated Inductors with Active Cooling Open
The paper presents the realization and characterization of micro-inductors with core with active cooling capability for future integrated DC/DC converter solutions operating with wide bandgap semiconductors at high temperatures with high p…
View article: Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets
Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets Open
A fully integrable magnetic microposition detection for miniaturized systems like MEMS devices is demonstrated. Whereas current magnetic solutions are based on the use of hybrid mounted magnets, here a combination of Hall sensors with a no…
View article: Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures
Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures Open
Powder-based techniques are gaining increasing interest for the fabrication of microstructures on planar substrates. A typical approach comprises the filling of a mold pattern with micron-sized particles of the desired material, and their …
View article: Pixelated phosphors for high-resolution and high-contrast white light sources: erratum
Pixelated phosphors for high-resolution and high-contrast white light sources: erratum Open
Erroneous absolute luminance values of the pixelated phosphor structure B25 (pixel size of 25 microns by 25 microns) have been corrected. The updated figure shows clearly the potential of the investigated structure as light-converter for h…
View article: Pixelated phosphors for high-resolution and high-contrast white light sources
Pixelated phosphors for high-resolution and high-contrast white light sources Open
Porous phosphor microstructures are studied for their potential as light converter in laser-based, high-resolution lighting systems. Phosphor particles are filled into pre-patterned silicon molds and coated by an atomic layer deposition wi…