Virpi Korpelainen
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View article: Reflectometry technique for study of complex multilayer micro- and nanostructures with lateral periodicity
Reflectometry technique for study of complex multilayer micro- and nanostructures with lateral periodicity Open
This study introduces a reflectometry-based technique for characterizing complex thin-film structures with lateral periodicity, using only a single, large-beam measurement to capture essential structural information. The PillarHall test ch…
View article: 3-axis force compensated piezo stage combination for high-speed SPM
3-axis force compensated piezo stage combination for high-speed SPM Open
Scanning stages are immanent for scanning probe microscope type tools and highly impact most of their properties, such as scanning speed and positioning accuracy. In this contribution, a serial assembly of an in open-loop operated 3-axes m…
View article: Application of active piezoresistive cantilevers in high-eigenmode surface imaging
Application of active piezoresistive cantilevers in high-eigenmode surface imaging Open
One of the most important limitations of the atomic force microscopy (AFM) is scanning speed, whose high values are required for contemporary high-resolution, long-range diagnostic applications. The measurement bandwidth of an AFM depends …
View article: Stitching accuracy in large area scanning probe microscopy
Stitching accuracy in large area scanning probe microscopy Open
Image stitching is a technique that can significantly enlarge the scan area of scanning probe microscope (SPM) images. It is also the most commonly used method to cover large areas in high-speed SPM. In this paper, we provide details on st…
View article: Comparing novel small-angle x-ray scattering approaches for absolute size and number concentration measurements of spherical SiO<sub>2</sub> particles to established methods
Comparing novel small-angle x-ray scattering approaches for absolute size and number concentration measurements of spherical SiO<sub>2</sub> particles to established methods Open
Biomedical analytical applications, as well as the industrial production of high-quality nano- and sub-micrometre particles, require accurate methods to quantify the absolute number concentration of particles. In this context, small-angle …
View article: Artificial neural network assisted spectral scatterometry for grating quality control
Artificial neural network assisted spectral scatterometry for grating quality control Open
Spectral scatterometry is a technique that allows rapid measurements of diffraction efficiencies of diffractive optical elements (DOEs). The analysis of such diffraction efficiencies has traditionally been laborious and time consuming. How…
View article: Traceable characterization of hollow organosilica beads as potential reference materials for extracellular vesicle measurements with optical techniques
Traceable characterization of hollow organosilica beads as potential reference materials for extracellular vesicle measurements with optical techniques Open
View article: Characterization of PillarHall test chip structures using a reflectometry technique
Characterization of PillarHall test chip structures using a reflectometry technique Open
Thin film samples where one of the thin layers consists of a vacuum or air are called PillarHalls due to their support structure in silicon wafers. Custom PillarHall samples were provided by Chipmetrics Ltd and characterized by reflectomet…
View article: Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels Open
Atomic layer deposition (ALD) raises global interest through its unparalleled conformality. This work describes new microscopic lateral high-aspect-ratio (LHAR) test structures for conformality analysis of ALD. The LHAR structures are made…
View article: Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels Open
Atomic layer deposition (ALD) raises global interest through its unparalleled conformality. This work describes new microscopic lateral high-aspect-ratio (LHAR) test structures for conformality analysis of ALD. The LHAR structures are made…
View article: Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels Open
Atomic layer deposition (ALD) raises global interest through its unparalleled conformality. This work describes new microscopic lateral high-aspect-ratio (LHAR) test structures for conformality analysis of ALD. The LHAR structures are made…
View article: Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels Open
Atomic layer deposition (ALD) raises global interest through its unparalleled conformality. This work describes new microscopic lateral high-aspect-ratio (LHAR) test structures for conformality analysis of ALD. The LHAR structures are made…
View article: Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels Open
Atomic layer deposition (ALD) raises global interest through its unparalleled conformality. This work describes new microscopic lateral high-aspect-ratio (LHAR) test structures for conformality analysis of ALD. The LHAR structures are made…
View article: Step height standards based on self-assembly for 3D metrology of biological samples
Step height standards based on self-assembly for 3D metrology of biological samples Open
Modern microscopes and profilometers such as the coherence scanning interferometer (CSI) approach sub-nm precision in height measurements. Transfer standards at all measured size scales are needed to guarantee traceability at any scale and…
View article: Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels
Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels Open
Thin films by atomic layer deposition (ALD) raise global interest through unparalleled conformality. Saturation profiles of the archetypical trimethylaluminum-water ALD process in narrow rectangular channels create a benchmark for future s…
View article: Atomic force microscope adhesion measurements and atomistic molecular dynamics simulations at different humidities
Atomic force microscope adhesion measurements and atomistic molecular dynamics simulations at different humidities Open
Due to their operation principle atomic force microscopes (AFMs) are sensitive to all factors affecting the detected force between the probe and the sample. Relative humidity is an important and often neglected-both in experiments and simu…
View article: DNA origami structures as calibration standards for nanometrology
DNA origami structures as calibration standards for nanometrology Open
In this work we have studied the feasibility of DNA origami nanostructures as dimensional calibration standards for atomic force microscopes (AFMs) at the nanometre scale. The stability of the structures and repeatability of the measuremen…