Yufan Jia
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View article: Effect of Workpiece Rotational Speed on Surface Quality in YAG Double-sided Planetary Lapping With the Trajectory Method
Effect of Workpiece Rotational Speed on Surface Quality in YAG Double-sided Planetary Lapping With the Trajectory Method Open
The double-sided planetary lapping technology with fixed grit is a good candidate to process thin Y 3 Al 5 O 12 (YAG) crystals wafer. However, the influence of workpiece rotational speed n w in the planetary wheel on grit trajectory distri…