Yusuke Funamoto
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View article: High surface laser-induced damage threshold of SrB<sub>4</sub>O<sub>7</sub> single crystals under 266-nm (DUV) laser irradiation
High surface laser-induced damage threshold of SrB<sub>4</sub>O<sub>7</sub> single crystals under 266-nm (DUV) laser irradiation Open
Under 266-nm (deep ultraviolet, DUV) laser irradiation, an SrB 4 O 7 (SBO) single crystal has been found to exhibit a surface laser-induced damage threshold (LIDT) of ∼ 16.4 J/cm 2 , which is higher than those of a synthetic silica glass (…
View article: A Comparison of Removal Phenomena in Photoresist Materials Using Laser Irradiation
A Comparison of Removal Phenomena in Photoresist Materials Using Laser Irradiation Open
Resist removal phenomena using laser irradiation were compared in the novolak resist and the PVP. Thresholds for stripping from the Si wafer and damaged at the Si wafer were evaluated for the laser irradiating condition in the normal atmos…