Field ion microscope
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Nanopore fabrication and characterization by helium ion microscopy Open
The Helium Ion Microscope (HIM) has the capability to image small features with a resolution down to 0.35 nm due to its highly focused gas field ionization source and its small beam-sample interaction volume. In this work, the focused heli…
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Imaging and Analytics on the Helium Ion Microscope Open
The helium ion microscope (HIM) has emerged as an instrument of choice for patterning, imaging and, more recently, analytics at the nanoscale. Here, we review secondary electron imaging on the HIM and the various methodologies and hardware…
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Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams Open
Focused ion beam nanoscale synthesis has emerged as a critical tool for selected area nanofabrication. Helium and neon ion beams from the gas field ion source have recently demonstrated unparalleled resolution among other scanning ion beam…
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A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope Open
The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofab…
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Tungsten Diselenide Patterning and Nanoribbon Formation by Gas‐Assisted Focused‐Helium‐Ion‐Beam‐Induced Etching Open
A gas‐assisted focused‐helium‐ion beam‐induced etching (FIBIE) process is introduced, which accelerates direct‐write patterning of WSe 2 relative to standard ion milling. The etching process utilizes the XeF 2 precursor molecule to provide…
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Bio-imaging with the helium-ion microscope: A review Open
Scanning helium-ion microscopy (HIM) is an imaging technique with sub-nanometre resolution and is a powerful tool to resolve some of the tiniest structures in biology. In many aspects, the HIM resembles a field-emission scanning electron m…
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Resolving multifrequential oscillations and nanoscale interfacet communication in single-particle catalysis Open
Imaging reactions across facets Metal nanoparticles used in heterogeneous catalysis can bear different facets with different reaction kinetics. Suchorski et al. used field electron microscopy with high spatial (∼2 nanometers) and time (∼2 …
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Three-Dimensional Molecular Alignment Inside Helium Nanodroplets Open
We demonstrate 3D spatial alignment of 3,5-dichloroiodobenzene molecules embedded in helium nanodroplets using nonresonant elliptically polarized 160 ps laser pulses at a 1 kHz repetition rate. Through Coulomb explosion imaging and ion-ion…
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Reflections on the Spatial Performance of Atom Probe Tomography in the Analysis of Atomic Neighborhoods Open
Atom probe tomography (APT) is often introduced as providing “atomic-scale” mapping of the composition of materials and as such is often exploited to analyze atomic neighborhoods within a material. Yet quantifying the actual spatial perfor…
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Impact of local electrostatic field rearrangement on field ionization Open
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Never at rest: insights into the conformational dynamics of ion channels from cryo‐electron microscopy Open
The tightly regulated opening and closure of ion channels underlies the electrical signals that are vital for a wide range of physiological processes. Two decades ago the first atomic level view of ion channel structures led to a detailed …
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Graphene engineering by neon ion beams Open
Achieving the ultimate limits of lithographic resolution and material performance necessitates engineering of matter with atomic, molecular, and mesoscale fidelity. With the advent of scanning helium ion microscopy, maskless He(+) and Ne(+…
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A high resolution ion microscope for cold atoms Open
We report on an ion-optical system that serves as a microscope for ultracold\nground state and Rydberg atoms. The system is designed to achieve a\nmagnification of up to 1000 and a spatial resolution in the 100 nm range,\nthereby surpassin…
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Revealing nano-scale lattice distortions in implanted material with 3D Bragg ptychography Open
Small ion-irradiation-induced defects can dramatically alter material properties and speed up degradation. Unfortunately, most of the defects irradiation creates are below the visibility limit of state-of-the-art microscopy. As such, our u…
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Theoretical model of the helium pinhole microscope Open
In recent years, the development of neutral helium microscopes has gained increasing interest. The low energy, charge neutrality, and inertness of the helium atoms makes helium microscopy an attractive candidate for the imaging of a range …
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Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition Open
The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a heli…
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Characterization of a compact ECR plasma source and its applications to studies of helium ion damage to tungsten Open
Exposure of tungsten to low energy (<100 eV) helium plasmas at temperatures between 900–1900 K in both laboratory experiments and tokamaks has been shown to cause severe nanoscale modification of the near surface resulting in the growth of…
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Characterising the performance of an ultrawide field-of-view 3D atom probe Open
The CAMECA Invizo 6000 atom probe microscope uses ion optics that differ significantly from the local electrode atom probe (LEAP). It uses dual antiparallel deep ultraviolet lasers, a flat counter electrode, and a series of accelerating an…
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Helium Ion Microscopy for Imaging and Quantifying Porosity at the Nanoscale Open
Nanoporous materials are key components in a vast number of applications from energy to drug delivery and to agriculture. However, the number of ways to analytically quantify the salient features of these materials, for example: surface st…
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Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources Open
While the application of focused ion beam (FIB) techniques has become a well-established technique in research and development for patterning and prototyping on the nanometer scale, there is still a large underused potential with respect t…
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Theoretical model of the helium zone plate microscope Open
Neutral helium microscopy is a new technique currently under development. Its advantages are the low energy, charge neutrality, and inertness of the helium atoms, a potential large depth of field, and the fact that at thermal energies the …
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Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector Open
A detection system based on a microchannel plate with a delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium ion microscope (HIM). This system is an improvement over other exi…
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CO Oxidation on Stepped Rh Surfaces: μm-Scale Versus Nanoscale Open
The catalytic CO oxidation reaction on stepped Rh surfaces in the 10 −6 mbar pressure range was studied in situ on individual μm-sized high-Miller-index domains of a polycrystalline Rh foil and on nm-sized facets of a Rh tip, employing pho…
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Optical Nanoscopy of High <i>T</i><sub>c</sub> Cuprate Nanoconstriction Devices Patterned by Helium Ion Beams Open
Helium ion beams (HIB) focused to subnanometer scales have emerged as powerful tools for high-resolution imaging as well as nanoscale lithography, ion milling, or deposition. Quantifying irradiation effects is an essential step toward reli…
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Comparative study of image contrast in scanning electron microscope and helium ion microscope Open
Summary Images of Ga + ‐implanted amorphous silicon layers in a 110 n‐type silicon substrate have been collected by a range of detectors in a scanning electron microscope and a helium ion microscope. The effects of the implantation dose an…
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Stationary beam full-field transmission helium ion microscopy using sub-50 keV He<sup>+</sup>: Projected images and intensity patterns Open
A dedicated transmission helium ion microscope (THIM) for sub-50 keV helium has been constructed to investigate ion scattering processes and contrast mechanisms, aiding the development of new imaging and analysis modalities. Unlike a comme…
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Nanoaperture fabrication in ultra-smooth single-grain gold films with helium ion beam lithography Open
We demonstrate a simple three-step gold thin-film sample preparation process to enhance the morphology and lithographic precision using helium ion based direct-writing. The procedure includes metal deposition, heat treatment and template s…
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Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy Open
The analysis of polymers by secondary ion mass spectrometry (SIMS) has been a topic of interest for many years. In recent years, the primary ion species evolved from heavy monatomic ions to cluster and massive cluster primary ions in order…
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Growth of membrane nanostructures on W co-deposition layer Open
Large-scale mm thick fiberform nanostructures are grown when materials are subjected to high flux helium ions with tungsten particles (ions and neutrals) precipitation. Observations of the large-scale fiberform nanostructures (LFNs) were c…
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An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization Open
In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, wh…