Precision engineering
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Microelectromechanical Systems (MEMS) for Biomedical Applications Open
The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled…
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Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications Open
Laser has been demonstrated to be a mature and versatile tool that presents great flexibility and applicability for the precision engineering of a wide range of materials over other established micromachining techniques. Past decades have …
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Manufacturing technologies toward extreme precision Open
Precision is one of the most important aspects of manufacturing. High precision creates high quality, high performance, exchangeability, reliability, and added value for industrial products. Over the past decades, remarkable advances have …
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3D Printed MEMS Technology—Recent Developments and Applications Open
Microelectromechanical systems (MEMS) are of high interest for recent electronic applications. Their applications range from medicine to measurement technology, from microfluidics to the Internet of Things (IoT). In many cases, MEMS elemen…
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Ultraprecision machining of microlens arrays with integrated on-machine surface metrology Open
Microlens arrays (MLAs) are increasingly applied in high-end photonics and imaging systems. Advanced diamond turning machining with tool servo technique is a superior method of fabricating micro-structured arrays with sub-micrometer form a…
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Magnetic Levitation Technology for Precision Motion Systems: A Review and Future Perspectives Open
Precision motion systems are the core of a wide range of manufacturing equipment and scientific instruments, and their motion performance directly determines the quality and speed of the associated manufacturing or metrology processes. Mag…
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Design and Analysis of a New High Precision Decoupled XY Compact Parallel Micromanipulator Open
With the development of nanotechnology that contains automatic control, precision machinery and precise measurement, etc., micro/nano manipulation has become a new research direction in recent years. This paper presents the design and anal…
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Vibration-Assisted Roll-Type Polishing System Based on Compliant Micro-Motion Stage Open
This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishin…
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The intersection of mechatronics and precision engineering: Synergies and future directions Open
The convergence of mechatronics and precision engineering has sparked significant interest due to its potential to revolutionize various industries, ranging from manufacturing to healthcare. This review explores the synergies between these…
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Precision Machining by Dicing Blades: A Systematic Review Open
Diamond dicing blades are profound cutting tools that find their applications in semiconductor back-end packaging and assembly processes. To fully appreciate the benefits of the dicing blade technique for precision machining, a deeper unde…
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Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation Open
Nano-positioning is widely used in Micro-electromechanical Systems (MEMS), micromanipulator and biomedicine, coupling errors and tiny output displacements are the main disadvantages of the one. A totally uncoupled micro/nano-positioning st…
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Ultrafast 3D high precision print of micro structures for optical instrument calibration procedures Open
Multi-photon polymerization, like the so-called direct laser writing (DLW) technique allows for flexible additive manufacturing of three-dimensional ultra-precise structures on the micro- and nanoscale. A possible application for DLW is th…
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On-machine focus variation measurement for micro-scale hybrid surface texture machining Open
Fast and accurate in-line areal surface topography measuring instruments are required to control the quality of microscale manufactured components, without significantly slowing down the production process. Full-field areal optical surface…
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Engineered PWM Drives for Achieving Rapid Step and Settle Times for MEMS Actuation Open
Microelectromechanical systems (MEMS) provide engineers with a rich palette of technical solutions to a wide range of actuation and sensing challenges. MEMS devices are low cost, easily integrated with sense and drive electronics, are robu…
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Design and Verification of Geometric Roughness Standards by Reverse Engineering Open
In order to ensure a reliable calibration of surface topography measuring instruments the use of practical calibration strategies is required. This requirement can be fulfilled when measurement standards with a defined surface structure in…
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Development of a Piezo-Driven Liquid Jet Dispenser with Hinge-Lever Amplification Mechanism Open
Owing to the quick response, compact structure, high precision, huge blocking force generation, and ease of operation, piezoelectric actuators are urgently being adopted in the field of advanced dispensing for jetting performance improveme…
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Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM Open
This paper develops an array micro-grooves manufacturing method using micro electrochemical machining (ECM) with disk electrode, which is prepared by in-situ micro wire electrical discharge machining (WEDM). This technology focuses on the …
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Fiducial-aided on-machine positioning method for precision manufacturing of optical freeform surfaces Open
There are still significant challenges in the accurate positioning of optical freeform surfaces on the machine tool and the measurement instrument due to the high accuracy requirement and their complex shapes. This paper proposes a Fiducia…
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Key Technologies and Design Methods of Ultra-Precision Aerostatic Bearings Open
Precision measurement technology and instruments are the basis for high-quality development in modern industry. With the specialization of supporting facilities, ultra-precision motion guidance has become a core technology to achieve ultra…
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Piezoelectric Actuators Open
With the rapid development of modern science and technology, great progress has been made in many high-tech fields such as aerospace engineering, ultra-precision machining and assembly, biomedical engineering, precision optical engineering…
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Research on Precision Blanking Process Design of Micro Gear Based on Piezoelectric Actuator Open
In order to process micro scale parts more conveniently, especially the micro parts with complex shape, a new micro blanking equipment based on piezoelectric ceramic driving is proposed in this paper. Compared with other large precision ma…
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Abrasive Waterjet (AWJ) Forces—Potential Indicators of Machining Quality Open
The necessity of monitoring the abrasive waterjet (AWJ) processes increases with the spreading of this tool into the machining processes. The forces produced on the workpiece during the abrasive waterjet machining can yield some valuable i…
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Comparison of micro and conventional injection moulding based on process precision and accuracy Open
Replication-based processes enable the large-scale production of precision and micro components made of many materials. As for polymers, injection moulding represents the most common technological solution. Micro polymer parts can be, in m…
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The Development of a Long-Stroke Precision Positioning Stage for Micro Fabrication by Two-Photon Polymerization Open
This paper applies a combined precision stage to fabricate micro-structures by two-photon polymerization (TPP).The combined stage consists of PZT and stepper-motor stages to achieve precision positioning in long displacements.First, we der…
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Analysis, Design, and Control of a Novel Elastomeric Bearing Positioning Stage Open
As products are required with higher precision, vibration control becomes more important for precision machining and inspection. A stage with both fast positioning and relative vibration eliminated can improve product quality. Elastomeric …
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Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography Open
This article concerns the characterization of the stability and performance of a motorized stage used in laser direct writing lithography. The system was built from commercial components and commanded by G-code. Measurements use a pseudo-p…
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Dynamic modeling method for air bearings in ultra-precision positioning stages Open
Air bearings have been widely used in ultra-precision positioning stages due to the property of nearly zero friction or wear. Small vibration of the bearing reduces the overall moving and positioning precision of the stage and hampers its …
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Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages Open
Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious infl…
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Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review Open
High-precision displacement sensing has been widely used across both scientific research and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform…
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Robust structural optimization in presence of manufacturing uncertainties through a boundary-perturbation method Open
Most manufacturing processes are inevitably characterized by process tolerances that ultimately affect the way a component behaves and complies with the design requirements. These uncertainties determine the real performance of a structure…