Nanolithography ≈ NanolithographyNanolithography
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A review of 2D and 3D plasmonic nanostructure array patterns: fabrication, light management and sensing applications Open
This review article discusses progress in surface plasmon resonance (SPR) of two-dimensional (2D) and three-dimensional (3D) chip-based nanostructure array patterns. Recent advancements in fabrication techniques for nano-arrays have endowe…
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From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity Open
Bottom-up nanofabrication by area-selective atomic layer deposition (ALD) is currently gaining momentum in semiconductor processing, because of the increasing need for eliminating the edge placement errors of top-down processing. Moreover,…
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Emerging technologies for high performance infrared detectors Open
Infrared photodetectors (IRPDs) have become important devices in various applications such as night vision, military missile tracking, medical imaging, industry defect imaging, environmental sensing, and exoplanet exploration. Mature semic…
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Nano-kirigami with giant optical chirality Open
On-site nano-kirigami enabled continuous shape transformation of gold nanofilm for 3D nanofabrication and giant optical chirality.
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Supramolecular Assemblies on Surfaces: Nanopatterning, Functionality, and Reactivity Open
Understanding how molecules interact to form large-scale hierarchical structures on surfaces holds promise for building designer nanoscale constructs with defined chemical and physical properties. Here, we describe early advances in this f…
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Insight into plasmonic hot-electron transfer and plasmon molecular drive: new dimensions in energy conversion and nanofabrication Open
Localized surface plasmon resonance (LSPR) of plasmonic nanoparticles and nanostructures has attracted wide attention because the nanoparticles exhibit a strong near-field enhancement through interaction with visible light, enabling subwav…
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Progress in ultrafast laser processing and future prospects Open
The unique characteristics of ultrafast lasers have rapidly revolutionized materials processing after their first demonstration in 1987. The ultrashort pulse width of the laser suppresses heat diffusion to the surroundings of the processed…
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Quantum nanophotonics in diamond [Invited] Open
The past decade has seen great advances in developing color centers in diamond for sensing, quantum information processing, and tests of quantum foundations.Increasingly, the success of these applications as well as fundamental investigati…
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Spatially resolved multicolor CsPbX <sub>3</sub> nanowire heterojunctions via anion exchange Open
Significance Semiconductor heterojunction is a key building block in modern electronics and optoelectronics. The accurate control over the composition, band gap, energy level (band bending), and doping level is the foundation of ideal func…
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Dynamic Color Displays Using Stepwise Cavity Resonators Open
High-resolution multicolor printing based on pixelated optical nanostructures is of great importance for promoting advances in color display science. So far, most of the work in this field has been focused on achieving static colors, limit…
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Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale Open
As a noncontact strategy with flexible tools and high efficiency, laser precision engineering is a significant advanced processing way for high-quality micro-/nanostructure fabrication, especially to achieve novel functional photoelectric …
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The Emerging Frontiers and Applications of High-Resolution 3D Printing Open
Over the past few decades, there has been an increasing interest in the fabrication of complex high-resolution three-dimensional (3D) architectures at micro/nanoscale. These architectures can be obtained through conventional microfabricati…
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Nanomanufacturing: A Perspective Open
Nanomanufacturing, the commercially scalable and economically sustainable mass production of nanoscale materials and devices, represents the tangible outcome of the nanotechnology revolution. In contrast to those used in nanofabrication fo…
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Evolution in Lithography Techniques: Microlithography to Nanolithography Open
In this era, electronic devices such as mobile phones, computers, laptops, sensors, and many more have become a necessity in healthcare, for a pleasant lifestyle, and for carrying out tasks quickly and easily. Different types of temperatur…
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Kirigami/origami: unfolding the new regime of advanced 3D microfabrication/nanofabrication with “folding” Open
Advanced kirigami/origami provides an automated technique for modulating the mechanical, electrical, magnetic and optical properties of existing materials, with remarkable flexibility, diversity, functionality, generality, and reconfigurab…
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150 mW deep-ultraviolet light-emitting diodes with large-area AlN nanophotonic light-extraction structure emitting at 265 nm Open
High-power 265 nm deep-ultraviolet (DUV) AlGaN-based light-emitting diodes (LEDs) with large-area AlN nanophotonic light-extraction structures that were fabricated by a nanoimprint lithography process are presented. Each DUV-LED has a larg…
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Three-dimensional femtosecond laser processing for lab-on-a-chip applications Open
The extremely high peak intensity associated with ultrashort pulse width of femtosecond laser allows us to induce nonlinear interaction such as multiphoton absorption and tunneling ionization with materials that are transparent to the lase…
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Physics of laser-driven tin plasma sources of EUV radiation for nanolithography Open
Laser-produced transient tin plasmas are the sources of extreme ultraviolet (EUV) light at 13.5 nm wavelength for next-generation nanolithography, enabling the continued miniaturization of the features on chips. Generating the required EUV…
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Antireflective Coatings: Conventional Stacking Layers and Ultrathin Plasmonic Metasurfaces, A Mini-Review Open
Reduction of unwanted light reflection from a surface of a substance is very essential for improvement of the performance of optical and photonic devices. Antireflective coatings (ARCs) made of single or stacking layers of dielectrics, nan…
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Noncontact atomic force microscopy III Open
No other method has opened the door to progress in nanoscience and nanotechnology as much as the introduction of scanning probe methods did in the 1980s, since they offer a way to visualize the nanoworld. For maximum impact, however, the a…
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Metamaterials and Metasurfaces: A Review from the Perspectives of Materials, Mechanisms and Advanced Metadevices Open
Throughout human history, the control of light, electricity and heat has evolved to become the cornerstone of various innovations and developments in electrical and electromagnetic technologies. Wireless communications, laser and computer …
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3D nanofabrication by volumetric deposition and controlled shrinkage of patterned scaffolds Open
Shrinking problems in 3D printing Although a range of materials can now be fabricated using additive manufacturing techniques, these usually involve assembly of a series of stacked layers, which restricts three-dimensional (3D) geometry. O…
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Mesoscale laser 3D printing Open
3D meso scale structures that can reach up to centimeters in overall size but retain micro- or nano-features, proved to be promising in various science fields ranging from micro-mechanical metamaterials to photonics and bio-medical scaffol…
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Three-dimensional all-dielectric metamaterial solid immersion lens for subwavelength imaging at visible frequencies Open
TiO 2 nanoparticles are demonstrated to assemble low-loss three-dimensional all-dielectric metamaterials working at visible frequencies.
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The Fabrication of Micro/Nano Structures by Laser Machining Open
Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure p…
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A Review on Low-Dimensional Nanomaterials: Nanofabrication, Characterization and Applications Open
The development of modern cutting-edge technology relies heavily on the huge success and advancement of nanotechnology, in which nanomaterials and nanostructures provide the indispensable material cornerstone. Owing to their nanoscale dime…
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Emerging nanofabrication and quantum confinement techniques for 2D materials beyond graphene Open
Recent advances in growth techniques have enabled the synthesis of high-quality large area films of 2D materials beyond graphene. As a result, nanofabrication methods must be developed for high-resolution and precise processing of these at…
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Promising Lithography Techniques for Next-Generation Logic Devices Open
Continuous rapid shrinking of feature size made the authorities to seek alternative patterning methods as the conventional photolithography comes with its intrinsic resolution limit. In this regard, some promising techniques have been prop…
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Simulation-Guided 3D Nanomanufacturing <i>via</i> Focused Electron Beam Induced Deposition Open
Focused electron beam induced deposition (FEBID) is one of the few techniques that enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of simple architectures such as vertical or curving nanowires has b…
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In-Plane Plasmonic Antenna Arrays with Surface Nanogaps for Giant Fluorescence Enhancement Open
Optical nanoantennas have a great potential for enhancing light-matter interactions at the nanometer scale, yet fabrication accuracy and lack of scalability currently limit ultimate antenna performance and applications. In most designs, th…