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Ángel Yanguas-Gil
,
Jeffrey W. Elam
·
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.11578/dc.20240923.1
· OA: W4404407762
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.11578/dc.20240923.1
· OA: W4404407762
SF-24-041 aldsim is a Python module that provides a set of ALD models that allow the user to explore the behavior of self-limited chemistries inside common reactor configurations.
Keywords: Computer science
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