Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranes Article Swipe
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· 2021
· Open Access
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· DOI: https://doi.org/10.1051/epjap/2021210068
Mechanical properties of a nanomechanical resonator significantly impact the performance of a resonant Nano-electromechanical system (NEMS) device. We study the mechanical properties of suspended membranes fabricated out of low-pressure chemical vapor deposited silicon nitride thin films. We fabricated doubly-clamped membranes of silicon nitride with thickness less than 50 nm and length varying from 5 to 60 μm. The elastic modulus and stress in the suspended membranes were measured using Atomic Force Microscope (AFM)-based nanomechanical spectroscopy. The elastic moduli of the suspended membranes are significantly higher than those of corresponding on-substrate thin films. We observed a reduction in net stress after the fabrication of suspended membrane, which is explained by estimating the thermal stress and intrinsic stress. We also use a mathematical model to study the stress and thickness-dependent elastic modulus of the ultrathin membranes. Lastly, we study the capillary force-gradient between the SiN x suspended membrane-Si substrate that could collapse the suspended membrane.
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- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1051/epjap/2021210068
- OA Status
- green
- Cited By
- 3
- References
- 38
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W3170542070